Rudra, Pratap (2003) Some issues in mechanical design of MEMS transducers. In: SPIE:Smart Materials, Structures, and Systems, 12-14 December, Bangalore, India, Vol.5062, 788-793.Full text not available from this repository.
The focus in MEMS technology is now slowly changing from process-centric research to design. More and more mechanical designers are entering MEMS field. However, most designers have intuitive feel for macro-scale designs, but not for micro-scale design. Intuition is an indispensable tool in design that cannot be replaced by brute force simulation. This paper is about some of the issues in mechanical design of MEMS transducer elements that are not yet a part of a designer's intuition. We discuss, through examples, why these issues belie our intuition at the micro-scale.
|Item Type:||Conference Paper|
|Additional Information:||Copyright of this article belongs to The International Society for Optical Engineering.|
|Department/Centre:||Division of Mechanical Sciences > Mechanical Engineering|
|Date Deposited:||27 Apr 2007|
|Last Modified:||11 Feb 2010 11:46|
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