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Frequency shift analysis for comb drive structures

Nath, Pandari S and Pratap, Rudra (1999) Frequency shift analysis for comb drive structures. In: SPIE:Indo-Russian Workshop on Micromechanical Systems, Vol.3903, 2-4 Febrauary 1999, New Delhi, India, pp. 45-58.

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Abstract

A sensor's frequency response range and its sensitivity mainly depend on the stiffness and the natural frequency distribution of the sensing structure. Both the parameters, stiffness and naturally frequency distribution, can be changed by varying the geometric configuration of the sensing structure. This paper present a frequency shift analysis of a typical microstructure used in MEMS. The frequency shift analysis is carried out by changing the geometric configuration of the structure and obtaining the frequency band for different configurations. This work provides a tool to understand the effect of geometric configuration on microsensor characteristics.

Item Type: Conference Paper
Additional Information: Copyright of this article belongs to SPIE-International Society for Optical Engineering.
Department/Centre: Division of Mechanical Sciences > Mechanical Engineering
Date Deposited: 28 May 2007
Last Modified: 27 Aug 2008 12:42
URI: http://eprints.iisc.ernet.in/id/eprint/10257

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