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Analysis of coupled diaphragms using coupled-mode theory

Selvarajan, Ananth and Srinivas, Talabuttala and Anand, SK (1999) Analysis of coupled diaphragms using coupled-mode theory. In: SPIE:Smart Structures and Materials 1999: Smart Electronics and MEMS, 1-3 March, Newport Beach, CA, USA, Vol.3673, 86-92.

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Abstract

Diaphragm pressure sensors based on silicon micromachining have advantages of small size and integrability with control electronics to form efficient MEMS applications. In this paper analysis of diaphragm based pressure sensors are presented by deriving the displacement function. Governing equations for individual diaphragms are given followed by analysis of a systems of two coupled diaphragms. Coupled mode theory is used to analyze the two diaphragm pressure sensors by expanding the combined mode fields in terms of individual modes of the single diaphragms. Results are presented for typical diaphragm parameters. Results indicate that coupled diaphragm sensors can be more efficient than single diaphragm sensors.

Item Type: Conference Paper
Additional Information: Copyright of this article belongs to SPIE -International Society for Optical Engineering.
Department/Centre: Division of Electrical Sciences > Electrical Communication Engineering
Date Deposited: 28 May 2007
Last Modified: 27 Aug 2008 12:43
URI: http://eprints.iisc.ernet.in/id/eprint/10296

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