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Micro-opto-electro-mechanical (MOEM) vibration sensor

Selvarajan, A and Pattnaik, PK and Gupta, VM and Srinivas, T (2000) Micro-opto-electro-mechanical (MOEM) vibration sensor. In: Smart Structures and Materials 2000: Smart Electronics and MEMS, 6-8 March 2000, Newport Beach, CA, USA, pp. 78-85.

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Abstract

The combination of Integrated Optics with micro-mechanical structures on silicon offers immense potential for smart structure applications. One such application is sensing and mapping of vibration and vibrational modes. In the present proposal, a cantilever formed by bulk micro machining of <100>. Silicon and optical waveguides formed by sol-gel process is considered. Among the various configurations possible, an optical directional coupler located close to foot of the cantilever is analyzed in detail. Analytical and simulation result using optical coupled mode theory to obtain the power transfer that is dependent on cantilever vibrations are presented.

Item Type: Conference Paper
Additional Information: Copyright of this article belongs to SPIE - The International Society for Optical Engineering
Keywords: coupled mode analysis;intelligent sensors;micro optics;microsensors;optical directional couplers;optical sensors;vibration measurement
Department/Centre: Division of Electrical Sciences > Electrical Communication Engineering
Date Deposited: 08 Aug 2007
Last Modified: 27 Aug 2008 12:44
URI: http://eprints.iisc.ernet.in/id/eprint/10424

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