Rajanna, K and Mohan, S and Nayak, MM and Gunasekaran, N (1990) Thin-film pressure transducer with manganese film as the strain gauge. In: Sensors and Actuators A: Physical, 24 (1). pp. 35-39.
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The performance of a thin-film pressure transducer with manganese film as the strain gauge is presented. The construction details of the pressure transducer diaphragm assembly are given. The process of depositing the insulating layers, sensing film, bonding pads, the protective overlayer, film stabilization and other related aspects are also described. Results on the output characteristics of the pressure transducer are reported.
|Item Type:||Journal Article|
|Additional Information:||Copyright of this article belongs to Elsevier Sequoia|
|Department/Centre:||Division of Physical & Mathematical Sciences > Instrumentation and Applied Physics (Formally ISU)|
|Date Deposited:||20 Dec 2007|
|Last Modified:||19 Sep 2010 04:41|
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