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Analysis of a nonuniform cantilever beam MOEM accelerometer under closed loop operation

Selvarajan, A and Jagannath, Nayak and Srinivas, T and Sastry, DVK (2005) Analysis of a nonuniform cantilever beam MOEM accelerometer under closed loop operation. In: Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, May 2005, San Diego, CA, United States, pp. 276-283.

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Abstract

In this paper, we propose a closed loop Micro-Opto-Electro-Mechanical (MOEM) accelerometer employing a nonuniform cantilever beam and an Anti Resonant Reflecting Optical Waveguide (ARROW) on silicon. The MOEM acelerometer consists of a Mach Zehnder Intereferometer (MZI) and an electro-elasto-optic phase modulator to nullify the acceleration induced phase change so as to make the device work in closed loop form. It is shown that MOEM accelerometers with noise equivalent acceleration of 0.255 µg/ \surd Hz, a dynamic range of 160g, scale factor stability of 1.57 ppm/°C and shock survivability of more than 1000 g is feasible.

Item Type: Conference Paper
Additional Information: This article copyright belongs to International Society for Optical Engineering
Department/Centre: Division of Electrical Sciences > Electrical Communication Engineering
Date Deposited: 27 Feb 2008
Last Modified: 27 Aug 2008 13:12
URI: http://eprints.iisc.ernet.in/id/eprint/13124

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