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Design aspects and performance evaluation of a planar magnetron

Mohanrao, G and Mohan, S (1990) Design aspects and performance evaluation of a planar magnetron. In: Vacuum, 40 (3). pp. 313-314.

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Abstract

A high rate magnetron target of 110 mm dia has been designed and fabricated. It is operated in dc sputtering mode and its performance is evaluated by studying the glow discharge characteristics, deposition uniformity and erosion area.

Item Type: Journal Article
Additional Information: Copyright of this article belongs to Elsevier.
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation and Applied Physics (Formally ISU)
Date Deposited: 07 Mar 2008
Last Modified: 19 Sep 2010 04:43
URI: http://eprints.iisc.ernet.in/id/eprint/13330

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