Investigations on zinc oxide thin films grown on Si (100) by thermal oxidation

Dhananjay, * and Nagaraju, J and Krupanidhi, SB (2007) Investigations on zinc oxide thin films grown on Si (100) by thermal oxidation. In: Materials Science and Engineering: B, 137 (1-3). pp. 126-130.

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Abstract

Thin films of ZnO were grown on p-type Si (100) substrates by thermal oxidation. The in situ growth of the metallic Zn films were thermally oxidized at different temperatures ranging from $300 to 500 ^0 C$ to yield ZnO thin films. The structural characterization of the thin films was carried out by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The X-ray diffraction measurements show that the films deposited at $500 ^0 C$ had better crystalline quality than the rest. The electrical transport properties of the ZnO/Si heterojunction were investigated by current–voltage (I–V) and capacitance–voltage (C–V) measurements. The heterojunction exhibited a barrier height, which is consistent with the energy difference between the work functions of Si and ZnO. Complex impedance spectroscopy measurements at temperatures ranging from $50 to 125 ^0 C$ were performed on these heterojunctions.

Item Type:	Journal Article
Additional Information:	Copyright of this article belongs to Elsevier.
Keywords:	Thermal oxidation;Heterojunction;Complex impedance spectroscopy
Department/Centre:	Division of Physical & Mathematical Sciences > Instrumentation and Applied Physics (Formally ISU) Division of Chemical Sciences > Materials Research Centre
Date Deposited:	02 Jun 2008
Last Modified:	19 Sep 2010 04:45
URI:	http://eprints.iisc.ernet.in/id/eprint/14106

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