# Reverse-bias annealing kinetics of Mg-H complexes in InP

Balasubramanian, Sathya and Kumar, Vikram and Balasubramanian, N (1993) Reverse-bias annealing kinetics of Mg-H complexes in InP. In: Journal of Applied Physics, 74 (7). pp. 4521-4526.

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## Abstract

The reactivation kinetics of hydrogen-passivated Mg acceptors in InP have been studied by annealing experiments carried out with different reverse biases. It is shown using a new analysis that the actual dissociation energy of the Mg-H complexes can be estimated even without applying a sufficient reverse bias to overcome retrapping of H at the dopant site. The dissociation process follows a first-order kinetics and the dissociation frequency and activation energy were estimated at various depths ranging from the surface up to $0.5 \mu m$ using an empirical analysis of the experimental data. A bias-independent dissociation energy of $1.40 \pm 0.08 eV$ was obtained when estimated at the surface. An apparently higher dissociation energy results when calculated in the bulk. This overestimation is pronounced for low-bias anneals and is explained as a result of retrapping. The concentration profile data is consistent with the positively charged state of the diffusing H in p-InP.

Item Type: Journal Article Copyright for this article belongs to American Institute of Physics. Division of Physical & Mathematical Sciences > Physics 24 Jun 2008 19 Sep 2010 04:46 http://eprints.iisc.ernet.in/id/eprint/14659