# Preparation and Characterization of Indium Oxide and Indium Tin Oxide Films by Activated Reactive Evaporation

Rao, K Narasimha and Kashyap, Sanjay (2006) Preparation and Characterization of Indium Oxide and Indium Tin Oxide Films by Activated Reactive Evaporation. In: Surface Review and Letters, 13 (2-3). pp. 221-225.

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## Abstract

Transparent and conducting oxide films find many applications because of their excellent properties such as high optical transparency, low surface resistance, high infrared reflectance, etc. Realization of these properties depend upon the choice of the deposition technique and the control of deposition parameters. In this paper, we report the preparation of highly transparent and conducting films of indium oxide $(In_2O_3)$ and indium tin oxide (ITO) by activated reactive evaporation on glass substrates. These films were deposited by evaporating pure indium and 90% In + 10% Sn alloy using an electron gun in the presence of oxygen ions at ambient temperature. Films of different thickness have been prepared and their optical, electrical and structural properties are studied. $In_2O_3$ films showed higher transparency (90%) compared to ITO films (85%) but the electrical resistivity was observed to be little higher $(2.5 \times 10^{-3} \Omega cm)$ compared to ITO films $(6 \times 10^{-4} \Omega cm)$. Hall measurements on aged ITO films gave the charge density of $3 \times 10^{20} per cm^3$ and mobility $35.6 cm^2/V-s$. The refractive index and extinction coefficient were found to be around 2.0 and 0.005 for ITO films and 2.10 and 0.001 for $In_2O_3$ films at 550 nm respectively. ITO and $In_2O_3$ films were amorphous in nature for lesser thickness, but for thicker films, the partial crystallinity was observed.

Item Type: Journal Article Copyright of this article belongs to World Scientific Publishing. Transparent conducting oxide films;optical properties;electrical properties;activated reactive evaporation. Division of Physical & Mathematical Sciences > Instrumentation and Applied Physics (Formally ISU)Division of Mechanical Sciences > Materials Engineering (formerly Metallurgy) 04 Aug 2008 27 Aug 2008 13:40 http://eprints.iisc.ernet.in/id/eprint/15431