Singh, Vijay Raj and Miao, Jianmin and Wang, Zhihong and Hegde, Gopalkrishna and Asundi, Anand (2007) Dynamic characterization of MEMS diaphragm using time averaged in-line digital holography. In: Optics Communications, 280 (2). pp. 285-290.
MEMS.pdf - Published Version
Restricted to Registered users only
Download (594Kb) | Request a copy
In this paper dynamic characterization of a MEMS diaphragm is investigated using lens-less time averaged in-line digital holography. The analysis and capability of the numerically reconstructed amplitude and phase information from in-line time averaged holograms as applied to MEMS vibration are presented. Particularly the effect of mean static state on the phase in time averaged digital holography is explored. A novel double exposure method is also demonstrated using a diverging object wave suitable for dynamic characterization of small size objects. A phase jump in the static deformation fringes in the vibrating regions is observed and described and can be used for precise analysis of vibration mode shape under simultaneous presence of mean static deformation. A simple and robust tool for dynamic optical metrology of MEMS devices and micro-objects using time averaged in-line digital holography is thus proposed.
|Item Type:||Journal Article|
|Additional Information:||Copyright of this article belongs to Elsevier.|
|Keywords:||In-line digital holography;Vibration;Time averaged method;MEMS;Mean static deformation.|
|Department/Centre:||Division of Mechanical Sciences > Aerospace Engineering (Formerly, Aeronautical Engineering)|
|Date Deposited:||16 Sep 2008 09:27|
|Last Modified:||19 Sep 2010 04:49|
Actions (login required)