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Compact modeling of inertial and rarefaction effects on quality factor of MEMS torsional structures in continuum to molecular flows under low operating frequencies

Pratap, Rudra and Pandey, Ashok Kumar (2008) Compact modeling of inertial and rarefaction effects on quality factor of MEMS torsional structures in continuum to molecular flows under low operating frequencies. In: MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, Monday 21 January 2008, San Jose, CA, USA.

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Abstract

The applicability of an existing compact model that captures the effect of rarefaction and inertia is studied in this paper. In order to ascertain the accuracy of the model, we take two different configurations of a torsional MEMS structure from the literature which operate under different frequencies and have different air-gap thicknesses. For the structure with large air-gap and low operating frequency, the analytical model based on the equivalent length captures the effect well under the continuum, slip, transition and the molecular regimes. On the other hand, for the structures with high operating frequencies but low air-gap thickness, the analytical model breaks down in the transition regime.

Item Type: Conference Paper
Additional Information: Copyright of this article belongs to SPIE.
Department/Centre: Division of Mechanical Sciences > Mechanical Engineering
Date Deposited: 18 Oct 2008 14:45
Last Modified: 18 Oct 2008 14:45
URI: http://eprints.iisc.ernet.in/id/eprint/16336

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