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A study of copper films obtained from the nebulized spray pyrolysis of different precursors

Aiyer, Hemantkumar N and Parashar, Sachin and Raju, AR and Shivashankar, SA and Rao, CNR (1999) A study of copper films obtained from the nebulized spray pyrolysis of different precursors. In: Journal Of Physics D-Applied Physics, 32 (1). pp. 1-8.

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Official URL: http://www.iop.org/EJ/abstract/0022-3727/32/1/002

Abstract

Metallic copper films have been deposited on Si(100) substrates by nebulized spray pyrolysis of Cu(acac)(2), Cu(hfac)(2) and Cu(dpm)(2). The structure and morphology of the films have been examined by x-ray diffraction and scanning electron microscopy. The films are polycrystalline in nature with a preferred (lll) orientation. Based on the electrical resistivity data, various transport parameters of the film have been estimated. Growth kinetics and the environmental stability of the films from the precursors have been compared. Taking all the factors into account, Cu(dpm)(2) seems to yield the best films of copper metal.

Item Type: Journal Article
Additional Information: Copyright of this article belongs to Institute of Physics.
Department/Centre: Division of Chemical Sciences > Materials Research Centre
Date Deposited: 07 Jan 2010 09:01
Last Modified: 29 Jun 2011 06:38
URI: http://eprints.iisc.ernet.in/id/eprint/18013

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