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On uniformity of film thickness on rotating substrates having a large source-to-substrate height

Ramprasad, BS and Radha, TS (1974) On uniformity of film thickness on rotating substrates having a large source-to-substrate height. In: Thin Solid Films, 20 (2). S47-S48.

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Abstract

Abstract is not available.

Item Type: Journal Article
Additional Information: Copyright of this article belongs to Elsevier Science.
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation and Applied Physics (Formally ISU)
Date Deposited: 31 Dec 2009 10:25
Last Modified: 19 Sep 2010 05:45
URI: http://eprints.iisc.ernet.in/id/eprint/23355

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