Some properties of indium-tin oxide-films

Radhakrishna, MC and Rao, M Ramakrishna (1977) Some properties of indium-tin oxide-films. In: Paramana, 9 (1). pp. 1-6.

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Abstract

Thin films of indium-tin oxide have been deposited by DC diode sputtering from an indium-tin alloy target in an argon, hydrogen and oxygen atmosphere. Films with sheet resistance of 11 ohms/square and 80% light transmission have been obtained. The effect of cathode composition and gas mixture on sheet resistance and optical transmission properties of the films have been studied.

Item Type:	Journal Article
Additional Information:	Copyright of this article belongs to Indian academy of sciences.
Keywords:	Indium;tin oxide films;optical properties of thin films;reactive evaporation.
Department/Centre:	Others
Date Deposited:	04 Feb 2010 06:52
Last Modified:	19 Sep 2010 05:50
URI:	http://eprints.iisc.ernet.in/id/eprint/24479

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