ePrints@IIScePrints@IISc Home | About | Browse | Latest Additions | Advanced Search | Contact | Help

Some properties of indium-tin oxide-films

Radhakrishna, MC and Rao, M Ramakrishna (1977) Some properties of indium-tin oxide-films. In: Paramana, 9 (1). pp. 1-6.

[img]
Preview
PDF
2.pdf - Published Version

Download (443Kb)
Official URL: http://www.springerlink.com/content/x3k768xk476025...

Abstract

Thin films of indium-tin oxide have been deposited by DC diode sputtering from an indium-tin alloy target in an argon, hydrogen and oxygen atmosphere. Films with sheet resistance of 11 ohms/square and 80% light transmission have been obtained. The effect of cathode composition and gas mixture on sheet resistance and optical transmission properties of the films have been studied.

Item Type: Journal Article
Additional Information: Copyright of this article belongs to Indian academy of sciences.
Keywords: Indium;tin oxide films;optical properties of thin films;reactive evaporation.
Department/Centre: Others
Date Deposited: 04 Feb 2010 06:52
Last Modified: 19 Sep 2010 05:50
URI: http://eprints.iisc.ernet.in/id/eprint/24479

Actions (login required)

View Item View Item