Radhakrishna, MC and Rao, M Ramakrishna (1977) Some properties of indium-tin oxide-films. In: Paramana, 9 (1). pp. 1-6.
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Thin films of indium-tin oxide have been deposited by DC diode sputtering from an indium-tin alloy target in an argon, hydrogen and oxygen atmosphere. Films with sheet resistance of 11 ohms/square and 80% light transmission have been obtained. The effect of cathode composition and gas mixture on sheet resistance and optical transmission properties of the films have been studied.
|Item Type:||Journal Article|
|Additional Information:||Copyright of this article belongs to Indian academy of sciences.|
|Keywords:||Indium;tin oxide films;optical properties of thin films;reactive evaporation.|
|Date Deposited:||04 Feb 2010 06:52|
|Last Modified:||19 Sep 2010 05:50|
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