Ramprasad, BS and Radha, TS (1979) On the uniformity of film thickness on rotating spherical substrates on a planar work holder. In: Thin Solid Films, 56 (3). pp. 363-367.
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Curves for the uniformity in film thickness on spherical substrates are drawn for various geometries. The optimum source-to-substrate height for maximum uniformity of the film thickness is determined. These data are approximated to achieve uniform thickness on a large number of small planar substrates loaded on a large spherical substrate holder, the appropriate geometry being selected on the basis of the radius of curvature of the substrate holder.
|Item Type:||Journal Article|
|Additional Information:||Copyright of this article belongs to Elsevier Science.|
|Department/Centre:||Division of Physical & Mathematical Sciences > Instrumentation and Applied Physics (Formally ISU)|
|Date Deposited:||28 Dec 2010 05:56|
|Last Modified:||28 Dec 2010 05:56|
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