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On the uniformity of film thickness on rotating spherical substrates on a planar work holder

Ramprasad, BS and Radha, TS (1979) On the uniformity of film thickness on rotating spherical substrates on a planar work holder. In: Thin Solid Films, 56 (3). pp. 363-367.

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Official URL: http://dx.doi.org/10.1016/0040-6090(79)90139-1

Abstract

Curves for the uniformity in film thickness on spherical substrates are drawn for various geometries. The optimum source-to-substrate height for maximum uniformity of the film thickness is determined. These data are approximated to achieve uniform thickness on a large number of small planar substrates loaded on a large spherical substrate holder, the appropriate geometry being selected on the basis of the radius of curvature of the substrate holder.

Item Type: Journal Article
Additional Information: Copyright of this article belongs to Elsevier Science.
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation and Applied Physics (Formally ISU)
Date Deposited: 28 Dec 2010 05:56
Last Modified: 28 Dec 2010 05:56
URI: http://eprints.iisc.ernet.in/id/eprint/33784

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