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Optical properties of activated reactive evaporated TiO2 films

Krishna, Ghanashyam M and Rao, Narasimha K and Murthy, Adinarayana and Mohan, S (1990) Optical properties of activated reactive evaporated TiO2 films. In: Materials Science and Engineering B, 5 (4). pp. 427-430.

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Official URL: http://dx.doi.org/10.1016/0921-5107(90)90131-T

Abstract

This paper discusses the optical properties of single-layer TiO2 films deposited using an activated reactive evaporation process. The combined effects of substrate temperature (in the range 70–200 °C) and discharge currents (0–400 mA) on refractive index, extinction coefficient and packing density of these films are investigated. Significant changes in refractive index values have been observed with increases in substrate temperature and discharge current. The change in refractive index is correlated with the variation in packing density. The variation in extinction coefficient was reduced using the combined effects of substrate temperature and discharge currents. A comparison with films deposited in neutral oxygen has also been made.

Item Type: Journal Article
Additional Information: Copyright of this article belongs to Elsevier Science.
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation and Applied Physics (Formally ISU)
Date Deposited: 27 Apr 2011 06:13
Last Modified: 27 Apr 2011 06:13
URI: http://eprints.iisc.ernet.in/id/eprint/34995

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