Nayak, MM and Gunasekaran, N and Muthunayagam, AE and Rajanna, K and Mohan, S (1993) Diaphragm-type sputtered platinum thin film strain gauge pressure transducer. In: Measurement Science and Technology, 4 (12). pp. 1319-1322.
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A diaphragm-type pressure transducer with a sputtered platinum film strain gauge (sensing film) has been designed and fabricated. The various steps followed to prepare thin film strain gauges on the diaphragm are described. M-bond 450 adhesive (Measurements Group, USA) has been employed as the insulating layer. A detailed procedure to cure this layer is given. A d.c. sputtering method is employed to prepare the platinum films. This paper also includes details of the strain gauge pattern and its location on the diaphragm. A description of the output characteristics and overall behaviour of the platinum thin film pressure transducer is reported.
|Item Type:||Journal Article|
|Additional Information:||Copyright of this article belongs to Institute of Physics.|
|Date Deposited:||10 Feb 2011 07:58|
|Last Modified:||10 Feb 2011 07:58|
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