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Laser patterning system for integrated optics and storage applications

Lad, Mahadev G and Naik, Goureesh M and Selvarajan, Ananth (1993) Laser patterning system for integrated optics and storage applications. In: Optical Engineering, 32 (4). pp. 725-729.

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Abstract

A computer-controlled laser writing system for optical integrated circuits and data storage is described. The system is characterized by holographic (649F) and high-resolution plates. A minimum linewidth of 2.5 mum is obtained by controlling the system parameters. We show that this system can also be used for data storage applications.

Item Type: Journal Article
Additional Information: Copyright of this article belongs to The International Society for Optical Engineering.
Department/Centre: Division of Electrical Sciences > Electrical Communication Engineering
Date Deposited: 11 Feb 2011 07:36
Last Modified: 11 Feb 2011 07:36
URI: http://eprints.iisc.ernet.in/id/eprint/35525

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