Phani, Arindam (2010) A Non-contact measurement technique to measure micro surface stress and obtain deformation profiles of the order of 1nm in Micro-cantilever based structures by single image Optical Diffraction method. In: Conference on Photonics North 2010, JUN 01-03, 2010, Niagara Falls, CANADA.Full text not available from this repository.
A new method based on analysis of a single diffraction pattern is proposed to measure deflections in micro-cantilever (MC) based sensor probes, achieving typical deflection resolutions of 1nm and surface stress changes of 50 mu N/m. The proposed method employs a double MC structure where the deflection of one of the micro-cantilevers relative to the other due to surface stress changes results in a linear shift of intensity maxima of the Fraunhofer diffraction pattern of the transilluminated MC. Measurement of such shifts in the intensity maxima of a particular order along the length of the structure can be done to an accuracy of 0.01mm leading to the proposed sensitivity of deflection measurement in a typical microcantilever. This method can overcome the fundamental measurement sensitivity limit set by diffraction and pointing stability of laser beam in the widely used Optical Beam Deflection method (OBDM).
|Item Type:||Conference Paper|
|Additional Information:||Copyright of this article belongs to The International Society for Optical Engineering.|
|Keywords:||Micro-cantilever based sensors; Surface Stress; Optical Diffraction|
|Department/Centre:||Division of Physical & Mathematical Sciences > Instrumentation and Applied Physics (Formally ISU)|
|Date Deposited:||31 Mar 2011 07:06|
|Last Modified:||31 Mar 2011 07:06|
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