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Chemical and microstructural modifications in LiPON thin films exposed to atmospheric humidity

Nimisha, CS and Rao, Mohan G and Munichandraiah, N and Natarajan, Gomathi and Cameron, David C (2011) Chemical and microstructural modifications in LiPON thin films exposed to atmospheric humidity. In: Solid State Ionics, 185 (1). pp. 47-51.

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Official URL: http://dx.doi.org/10.1016/j.ssi.2011.01.001

Abstract

Lithium phosphorus oxynitride (LiPON), the widely used solid electrolyte for thin film microbatteries, is not compatible with the ambient humid temperatures. The reasons for reduction in ionic conductivity of LiPON thin films from 2.8 x 10(-6) Scm(-1) to 9.9 x 10(-10) Scm(-1) when exposed to air are analyzed with the aid of AC impedance measurements, SEM, XPS and stylus profilometry. Initially, particulate-free film surfaces obtained soon after rf sputter deposition in N-2 ambient conditions becomes covered with microstructures, forming pores in the film when exposed to air. LiPON films are deposited on Ti coated silicon in addition to bare silicon, ruling out the possibility of stress-related rupturing from the LiPON/Si interface. The reduction of nitrogen, phosphorus, and increased presence of lithium, oxygen and carbon over the film surface lowers the ionic conductivity of LiPON films when exposed to air. (c) 2011 Elsevier B.V. All rights reserved.

Item Type: Journal Article
Additional Information: Copyright of this article belongs to Elsevier Science B.V.
Keywords: Solid electrolyte;Moisture effects;Ionic conductivity
Department/Centre: Division of Chemical Sciences > Inorganic & Physical Chemistry
Division of Physical & Mathematical Sciences > Instrumentation and Applied Physics (Formally ISU)
Division of Physical & Mathematical Sciences > Physics
Date Deposited: 19 Apr 2011 05:31
Last Modified: 19 Apr 2011 05:31
URI: http://eprints.iisc.ernet.in/id/eprint/36941

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