ePrints@IIScePrints@IISc Home | About | Browse | Latest Additions | Advanced Search | Contact | Help

Tantalum oxide films prepared by unbalanced reactive magnetron sputtering

Rao, Rama N and Chandramani, R and Rao, Mohan G (1999) Tantalum oxide films prepared by unbalanced reactive magnetron sputtering. In: Journal of Materials Science Letters, 18 (23). pp. 1949-1951.

[img] PDF
Tantalum_oxide_films_prepared.pdf - Published Version
Restricted to Registered users only

Download (38Kb) | Request a copy
Official URL: http://www.springerlink.com/content/nq33w5j0781413...
Item Type: Journal Article
Additional Information: Copyright of this article belongs to Springer.
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation and Applied Physics (Formally ISU)
Date Deposited: 02 Jul 2011 06:08
Last Modified: 02 Jul 2011 06:08
URI: http://eprints.iisc.ernet.in/id/eprint/38839

Actions (login required)

View Item View Item