Devi, Anjana and Shivashankar, SA (1999) Thermal analysis of metalorganic complexes of copper for evaluation as CVD precursors. In: Journal of Thermal Analysis and Calorimetry, 55 (1). pp. 259-270.
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Metalorganic complexes of copper have been synthesized by modifying the ligand in the beta-diketonate class of compounds. Detailed thermal analysis of several beta-diketonate complexes of copper has been carried out to evaluate their suitability as precursors for chemical vapor deposition (CVD). A comparison of their relative volatilities has been made by determining their sublimation rates at different temperatures. Thermal analyses of these complexes reveal significant differences among their volatilities and decomposition patterns.
|Item Type:||Journal Article|
|Additional Information:||Copyright of this article belongs to Springer.|
|Department/Centre:||Division of Chemical Sciences > Materials Research Centre|
|Date Deposited:||02 Jul 2011 04:44|
|Last Modified:||02 Jul 2011 04:45|
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