Devi, Anjana and Shivashankar, SA (1999) Thermal analysis of metalorganic complexes of copper for evaluation as CVD precursors. In: Journal of Thermal Analysis and Calorimetry, 55 (1). pp. 259-270.
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Abstract
Metalorganic complexes of copper have been synthesized by modifying the ligand in the beta-diketonate class of compounds. Detailed thermal analysis of several beta-diketonate complexes of copper has been carried out to evaluate their suitability as precursors for chemical vapor deposition (CVD). A comparison of their relative volatilities has been made by determining their sublimation rates at different temperatures. Thermal analyses of these complexes reveal significant differences among their volatilities and decomposition patterns.
| Item Type: | Journal Article |
|---|---|
| Additional Information: | Copyright of this article belongs to Springer. |
| Keywords: | CVD;metalorganic precursors;thermogravimetry |
| Department/Centre: | Division of Chemical Sciences > Materials Research Centre |
| Date Deposited: | 02 Jul 2011 04:44 |
| Last Modified: | 02 Jul 2011 04:45 |
| URI: | http://eprints.iisc.ernet.in/id/eprint/38862 |
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