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Cobalt oxide thin films prepared by metalorganic chemical vapor deposition from cobalt acetylacetonate

Mane, AU and Shalini, K and Shivashankar, SA (2001) Cobalt oxide thin films prepared by metalorganic chemical vapor deposition from cobalt acetylacetonate. In: Journal de Physique IV - Proceedings, 11 (PR3). pp. 637-643.

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Official URL: http://jp4.journaldephysique.org/index.php?option=...

Abstract

Thin films of cobalt oxide have been deposited on various substrates, such as glass, Si(100), SrTiO3(100), and LaAlO3(100), by low pressure metalorganic chemical vapor deposition (MOCVD) using cobalt(IL), acetylacetonate as the precursor. Films obtained in the temperature range 400-600 degreesC were uniform and highly crystalline having Co3O4 phase as revealed by x-ray diffraction. Under similar conditions of growth, highly oriented thin films of cobalt oxide grow on SrTiO3(100) and LaAlO3(100). The microstructure and the surface morphology of cobalt oxide films on glass, Si(100) and single crystalline substrates, SrTiO3(100) and LaAlO3(100) were studied by scanning electron microscopy. Optical properties of the films were studied by uv-visible-near IR spectrophotometry.

Item Type: Journal Article
Additional Information: Copyright of this article belongs to EDP Sciences.
Department/Centre: Division of Chemical Sciences > Materials Research Centre
Date Deposited: 02 Aug 2011 08:32
Last Modified: 02 Aug 2011 08:32
URI: http://eprints.iisc.ernet.in/id/eprint/39516

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