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Design of Piezoelectric MEMS Cantilever for High Speed AFM

Baskar, Sam S and Ashwin, Lal and Madhavi, S and Rudra, Pratap (2009) Design of Piezoelectric MEMS Cantilever for High Speed AFM. In: International Conference on MEMS (ICMEMS 2009), January 3-5, 2009, IIT Madras.

Full text not available from this repository.
Item Type: Conference Paper
Department/Centre: Division of Mechanical Sciences > Mechanical Engineering
Date Deposited: 19 Dec 2011 09:51
Last Modified: 19 Dec 2011 09:51
URI: http://eprints.iisc.ernet.in/id/eprint/40096

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