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Effect of annealing temperature on electrical and nano-structural properties of sol-gel derived ZnO thin films

Vishwas, M and Rao, Narasimha K and Phani, AR and Gowda, Arjuna KV and Chakradhar, RPS (2011) Effect of annealing temperature on electrical and nano-structural properties of sol-gel derived ZnO thin films. In: Journal of Materials Science: Materials in Electronics, 22 (9). pp. 1415-1419.

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Abstract

Zinc oxide (ZnO) thin films have been prepared on silicon substrates by sol-gel spin coating technique with spinning speed of 3,000 rpm. The films were annealed at different temperatures from 200 to 500 A degrees C and found that ZnO films exhibit different nanostructures at different annealing temperatures. The X-ray diffraction (XRD) results showed that the ZnO films convert from amorphous to polycrystalline phase after annealing at 400 A degrees C. The metal oxide semiconductor (MOS) capacitors were fabricated using ZnO films deposited on pre-cleaned silicon (100) substrates and electrical properties such as current versus voltage (I-V) and capacitance versus voltage (C-V) characteristics were studied. The electrical resistivity decreased with increasing annealing temperature. The oxide capacitance was measured at different annealing temperatures and different signal frequencies. The dielectric constant and the loss factor (tan delta) were increased with increase of annealing temperature.

Item Type: Journal Article
Additional Information: Copyright of this article belongs to Springer.
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation and Applied Physics (Formally ISU)
Date Deposited: 03 Sep 2011 10:21
Last Modified: 03 Sep 2011 10:21
URI: http://eprints.iisc.ernet.in/id/eprint/40404

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