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Effect of Process Induced Variations on the Performance Characteristics of Dual Mass Vibratory MEMS Gyroscope

Lohar, KA and Venkatesh, KP and Pratap, R (2008) Effect of Process Induced Variations on the Performance Characteristics of Dual Mass Vibratory MEMS Gyroscope. In: International Conference on Smart materials, Structures and Systems, Indian Institute of Science, Bangalore, IISc Bangalore.

Full text not available from this repository.
Item Type: Conference Paper
Department/Centre: Division of Mechanical Sciences > Mechanical Engineering
Date Deposited: 11 Oct 2011 07:08
Last Modified: 11 Oct 2011 07:08
URI: http://eprints.iisc.ernet.in/id/eprint/41086

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