Sharma, Sudhir Kumar and Jithin, MA and Sumesh, MA and Mohan, S (2009) Design Fabrication and Calibration of Three Target Magnetron Co-sputtering System for Shape memory Alloy Thin Films. In: Proc. of Third National Conference on MEMS, Smart Structures and Materials (ISSS-2009) at CGCRI, 151-154, Kolkata.
Full text not available from this repository.| Item Type: | Conference Paper |
|---|---|
| Department/Centre: | Division of Physical & Mathematical Sciences > Instrumentation and Applied Physics (Formally ISU) |
| Date Deposited: | 16 Dec 2011 08:35 |
| Last Modified: | 16 Dec 2011 08:35 |
| URI: | http://eprints.iisc.ernet.in/id/eprint/41226 |
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