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A Surface Modification Process for Lift-Off Applications using Direct Write Laser Lithography

Anand, S and Bhat, Navakanta and Bhat, KN and Mohan, S (2009) A Surface Modification Process for Lift-Off Applications using Direct Write Laser Lithography. In: Proc. of International Conference on MEMS 2009 .

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Item Type: Conference Paper
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation and Applied Physics (Formally ISU)
Date Deposited: 16 Dec 2011 08:34
Last Modified: 16 Dec 2011 08:34
URI: http://eprints.iisc.ernet.in/id/eprint/41227

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