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Topology Optimization of Compliant Micromechnisms with Manufaturing Constraints Imposed by the Wet Ecthing of (110) Silicon

Hegde, S and Ananthasuresh, GK (2007) Topology Optimization of Compliant Micromechnisms with Manufaturing Constraints Imposed by the Wet Ecthing of (110) Silicon. In: 2nd National ISSS Conference on MEMS, Microsensors, Smart Materials, Structures, and Systems, , Nov. 16-17, 2007, Pilani, India.

Full text not available from this repository.
Item Type: Conference Paper
Department/Centre: Division of Mechanical Sciences > Mechanical Engineering
Date Deposited: 28 Oct 2011 09:43
Last Modified: 28 Oct 2011 09:43
URI: http://eprints.iisc.ernet.in/id/eprint/41761

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