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Squeeze Film Damping in Perforated MEMS Torsion Mirror

Pandey, AK and Pratap, R (2007) Squeeze Film Damping in Perforated MEMS Torsion Mirror. In: International conference on Emerging Mechanical Technology MACRO TO NANO (EMTM2N-2007), , 16-18 February 2007, BITS Pilani.

Full text not available from this repository.
Item Type: Conference Paper
Department/Centre: Division of Mechanical Sciences > Mechanical Engineering
Date Deposited: 28 Oct 2011 09:10
Last Modified: 28 Oct 2011 09:10
URI: http://eprints.iisc.ernet.in/id/eprint/41788

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