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Scalable processes for fabricating non-volatile memory devices using self-assembled 2D arrays of gold nanoparticles as charge storage nodes

Muralidharan, Girish and Bhat, Navakanta and Santhanam, Venugopal (2012) Scalable processes for fabricating non-volatile memory devices using self-assembled 2D arrays of gold nanoparticles as charge storage nodes. In: Nanoscale, 3 (11). pp. 4575-4579.

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Abstract

We propose robust and scalable processes for the fabrication of floating gate devices using ordered arrays of 7 nm size gold nanoparticles as charge storage nodes. The proposed strategy can be readily adapted for fabricating next generation (sub-20 nm node) non-volatile memory devices.

Item Type: Journal Article
Additional Information: Copyright of this article belongs to Royal Society of Chemistry.
Department/Centre: Division of Electrical Sciences > Electrical Communication Engineering
Division of Mechanical Sciences > Chemical Engineering
Other Centres/Units > Centre for Nano Science and Engineering
Date Deposited: 29 Nov 2011 09:24
Last Modified: 30 Nov 2011 07:24
URI: http://eprints.iisc.ernet.in/id/eprint/42444

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