Pamidighantam, Sayanu (2004) Transient Characteristics of BCB Encapsulated Surface Micromachined Aluminum Micro-Mechanical Resonators. In: EPTC 2004 6th Electronics Packaging Technology Conference, 8-10 December, Singapore, pp. 177-182.
In this contribution, the transient characteristics of benzo cyclo butene (BCB) encapsulated aluminum (Al) micro mechanical resonators as a function of time varying pressure are studied. The quality factor of encapsulated Al resonator showed a drastic change with time of more than 200% reduction. The estimated transient leak rate spans over several orders of magnitude $(10^-^5 to 10^-^9 atm cm^3 s^-^1)$. A theoretical description of Al micro mechanical resonator and the leak rate are presented. Possible causes for the leak rate and the potential solutions are also outlined.
|Item Type:||Conference Paper|
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|Department/Centre:||Division of Information Sciences > Supercomputer Education & Research Centre|
|Date Deposited:||08 Dec 2005|
|Last Modified:||19 Sep 2010 04:21|
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