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Transient Characteristics of BCB Encapsulated Surface Micromachined Aluminum Micro-Mechanical Resonators

Pamidighantam, Sayanu (2004) Transient Characteristics of BCB Encapsulated Surface Micromachined Aluminum Micro-Mechanical Resonators. In: EPTC 2004 6th Electronics Packaging Technology Conference, 8-10 December, Singapore, pp. 177-182.

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Abstract

In this contribution, the transient characteristics of benzo cyclo butene (BCB) encapsulated aluminum (Al) micro mechanical resonators as a function of time varying pressure are studied. The quality factor of encapsulated Al resonator showed a drastic change with time of more than 200% reduction. The estimated transient leak rate spans over several orders of magnitude $(10^-^5 to 10^-^9 atm cm^3 s^-^1)$. A theoretical description of Al micro mechanical resonator and the leak rate are presented. Possible causes for the leak rate and the potential solutions are also outlined.

Item Type: Conference Paper
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Department/Centre: Division of Information Sciences > Supercomputer Education & Research Centre
Date Deposited: 08 Dec 2005
Last Modified: 19 Sep 2010 04:21
URI: http://eprints.iisc.ernet.in/id/eprint/4334

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