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Optical constants of DC magnetron sputtered titanium dioxide thin films measured by spectroscopic ellipsometry

Karunagaran, B and Kumar, Rajendra RT and Viswanathan, C and Mangalaraj, D and Narayandass, Sa K and Rao, Mohan G (2003) Optical constants of DC magnetron sputtered titanium dioxide thin films measured by spectroscopic ellipsometry. In: Crystal Research and Technology, 38 (9). pp. 773-778.

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Abstract

Optical constants of DC magnetron sputtered $TiO_2$ thin film have been determined by Spectroscopic Ellipsometry in the photon energy range 1.2 to 5.5 eV at room temperature. The measured dielectric-function spectra reveal distinct structures at energies of the E1, E1 + \bigtriangleup 1 and E2 critical points are due to interband transitions. The root mean square roughness of the magnetron sputtered $TiO_2$ thin films evaluated by ex-situ atomic force microscopy is 5.8 nm. The Dielectric constant values were found to be substantially lower than those for the bulk $TiO_2$. The dielectric related Optical constants, such as the refractive index, extinction coefficient, absorption coefficient and normal incidence of reflectivity determined from the spectroscopic ellipsometry data are presented and analyzed. The optical constants of the films were also determined using the optical transmittance measurements and the results were discussed.

Item Type: Journal Article
Additional Information: The copyright belongs to WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Keywords: titanium dioxide thin films;spectroscopic ellipsometry;optical constants;dc magnetron sputtering
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation and Applied Physics (Formally ISU)
Date Deposited: 14 Dec 2005
Last Modified: 27 Aug 2008 11:37
URI: http://eprints.iisc.ernet.in/id/eprint/4387

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