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Reactive biased target ion beam deposited W-DLC nanocomposite thin films - Microstructure and its mechanical properties

Bharathy, Vijai P and Yang, Q and Kiran, MSRN and Rha, JongJoo and Nataraj, D and Mangalaraj, D (2012) Reactive biased target ion beam deposited W-DLC nanocomposite thin films - Microstructure and its mechanical properties. In: DIAMOND AND RELATED MATERIALS, 23 . pp. 34-43.

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Official URL: http://dx.doi.org/10.1016/j.diamond.2011.12.016

Abstract

Tungsten incorporated diamond like carbon (W-DLC) nanocomposite thin films with variable fractions of tungsten were deposited by using reactive biased target ion beam deposition technique. The influence of tungsten incorporation on the microstructure, surface topography, mechanical and tribological properties of the DLC were studied using X-ray photoelectron spectroscopy (XPS), Raman spectroscopy. Atomic force microscope (AFM), transmission electron microscopy (TEM), nano-indentation and nano-scratch tests. The amount of W in films gets increases with increasing target bias voltage and most of the incorporated W reacts with carbon to form WC nanoclusters. Using TEM and FFT pattern, it was found that spherical shaped WC nanoclusters were uniformly dispersed in the DLC matrix and attains hexagonal (W2C) crystalline structure at higher W concentration. On the other hand, the incorporation of tungsten led to increase the formation of C-sp(2) hybridized bonding in DLC network and which is reflected in the hardness and elastic modulus of W-DLC films. Moreover, W-DLC films show very low friction coefficient and increased adhesion to the substrate than the DLC film, which could be closely related to its unique nanostructure of the W incorporated thin films. (C) 2011 Elsevier B.V. All rights reserved.

Item Type: Journal Article
Additional Information: Copyright for this article belongs to Elsevier
Keywords: Diamond like carbon; Tungsten; Reactive biased target ion beam deposition; XPS; Mechanical properties
Department/Centre: Division of Mechanical Sciences > Materials Engineering (formerly Metallurgy)
Date Deposited: 08 Aug 2012 09:02
Last Modified: 08 Aug 2012 09:02
URI: http://eprints.iisc.ernet.in/id/eprint/44521

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