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Indium tin oxide coatings on flexible and rigid substrates for application in smart windows

Vinodh, MS and Mohan, Sangeneni and Subaskar, P and Rathnakar, * and Bhojraj, H and Narayanamurthy, H (2003) Indium tin oxide coatings on flexible and rigid substrates for application in smart windows. In: SPIE Smart Materials, Structures, and Systems, Vol.5062 780-787.

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Abstract

Transparent conducting tin-doped indium oxide (ITO) thin films were deposited on Teflon and glass substrates using RF magnetron sputtering technique from an ITO ceramic target. The substrates were loaded on a cylindrical drum maintained at a temperature of 15 ± 2°C and rotated at a constant rate of 6 rpm. At the optimal deposition condition, the ITO thin films with maximum transmission of 93% and a minimum sheet resistance of 10 \Omega/\angle was achieved.

Item Type: Conference Paper
Additional Information: The Copyright belongs to The International Society for Optical Engineering.
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation and Applied Physics (Formally ISU)
Date Deposited: 11 May 2006
Last Modified: 27 Aug 2008 11:55
URI: http://eprints.iisc.ernet.in/id/eprint/6499

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