Vinodh, MS and Mohan, Sangeneni and Subaskar, P and Rathnakar, * and Bhojraj, H and Narayanamurthy, H (2003) Indium tin oxide coatings on flexible and rigid substrates for application in smart windows. In: SPIE Smart Materials, Structures, and Systems, Vol.5062 780-787.Full text not available from this repository. (Request a copy)
Transparent conducting tin-doped indium oxide (ITO) thin films were deposited on Teflon and glass substrates using RF magnetron sputtering technique from an ITO ceramic target. The substrates were loaded on a cylindrical drum maintained at a temperature of 15 ± 2°C and rotated at a constant rate of 6 rpm. At the optimal deposition condition, the ITO thin films with maximum transmission of 93% and a minimum sheet resistance of 10 \Omega/\angle was achieved.
|Item Type:||Conference Paper|
|Additional Information:||The Copyright belongs to The International Society for Optical Engineering.|
|Department/Centre:||Division of Physical & Mathematical Sciences > Instrumentation and Applied Physics (Formally ISU)|
|Date Deposited:||11 May 2006|
|Last Modified:||27 Aug 2008 11:55|
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