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# Characteristics of indium tin oxide films deposited by bias magnetron sputtering

Sujatha, Ch and Rao, Mohan G and Uthanna, S (2002) Characteristics of indium tin oxide films deposited by bias magnetron sputtering. In: Materials Science and Engineering B, 94 (1). pp. 106-110.

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## Abstract

Indium tin oxide coatings have been deposited on glass substrates with substrate bias as a process parameter along with substrate temperature. It was found that films deposited with substrate heating and/or substrate bias were polycrystalline in nature and predominantly (400) oriented. The results are correlated to microstructural variation due to the process parameters. Films with lowest sheet resistance, 7.6 ohm/sq and electron concentration of $8.1 \times10^{21}\hspace{2mm}cm^{-3}$ have been achieved in case of films deposited at $370^o\hspace{2mm}C$ with a substrate bias of + 18 V

Item Type: Journal Article Copyright of this article belongs to Elsevier. Transparent conductors;Bias sputtering;Indium tin oxide Division of Physical & Mathematical Sciences > Instrumentation and Applied Physics (Formally ISU) 02 Jun 2006 19 Sep 2010 04:28 http://eprints.iisc.ernet.in/id/eprint/7370

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