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Characterization of $YBa_2Cu_3O_{7-x}$ thin films deposited by high pressure oxygen sputtering

Muralidhar, GK and Rao, Mohan G and Mohan, S and Kulkarni, VN and Balasubramanian, TV (1994) Characterization of $YBa_2Cu_3O_{7-x}$ thin films deposited by high pressure oxygen sputtering. In: Solid State Communications, 89 (8). pp. 713-717.

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Abstract

Superconducting $YBa_2Cu_30_7$ thin films have been deposited by high pressure oxygen sputtering technique (HOST). The epitaxial films prepared on MgO substrates have been analysed using Rutherford Backscattering Spectroscopy (RBS) and Auger Electron Spectroscopy (AES). The films are found to be stoichiometric and homogeneous. Thickness uniformity and surface roughness of these films have also been analysed. The possible sputter mechanism in this method has been discussed.

Item Type: Journal Article
Additional Information: The copyright of this article belongs to Elsevier.
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation and Applied Physics (Formally ISU)
Date Deposited: 06 Jul 2006
Last Modified: 19 Sep 2010 04:30
URI: http://eprints.iisc.ernet.in/id/eprint/7887

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