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Determination of interlayer composition at buried interfaces using soft x-ray resonant reflectivity

Nayak, Maheswar and Lodha, GS and Sinha, AK and Nandedkar, RV and Shivashankar, SA (2006) Determination of interlayer composition at buried interfaces using soft x-ray resonant reflectivity. In: Applied Physics Letters, 89 (18). 181920-1-3.

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Abstract

The authors report determination of interlayer composition with subnanometer sensitivity at the buried interfaces using soft x-ray resonant reflectivity technique. Near the absorption edge, fine structure features of energy-dependent atomic scattering factor are sensitive to the composition, and can be exploited for determination of composition at the buried interfaces. This technique is demonstrated for a Mo–Si multilayer system using soft x-ray resonant reflectivity measurement.

Item Type: Journal Article
Additional Information: Copyright of this article belongs to American Institute of Physics.
Department/Centre: Division of Chemical Sciences > Materials Research Centre
Date Deposited: 08 Dec 2006
Last Modified: 19 Sep 2010 04:33
URI: http://eprints.iisc.ernet.in/id/eprint/9055

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