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Capabilities and limitations of micro-opto-electro mechnical (MOEM) accelerometers: an analysis

Selvarajan, Ananth and Nayak, Jagannath and Srinivas, Talabuttala and Sastry, DVK (2004) Capabilities and limitations of micro-opto-electro mechnical (MOEM) accelerometers: an analysis. In: SPIE: Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 15 March, San Diego, CA, USA, Vol.5389, 229-240.

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Abstract

Micro-Opto-Electro-Mechanical (MOEM) accelerometers employing a cantilever beam and anti resonant reflecting optical waveguide (ARROW) on a silicon is analyzed. Two types of MOEM accelerometers and a closed loop operation that can enhance the performance significantly compared to MEMS accelerometer is presented. As a typical example our study shows a MOEM accelerometer with a minimum detectable acceleration of 0.255 \mu g/Hz, a dynamic range of 160g, scale factor stability of 1.57 ppm/°c and shock survivability of more than 1000 g.

Item Type: Conference Paper
Additional Information: Copyright of this article belongs to the International Society for Optical Engineering.
Department/Centre: Division of Electrical Sciences > Electrical Communication Engineering
Date Deposited: 05 Apr 2007
Last Modified: 27 Aug 2008 12:38
URI: http://eprints.iisc.ernet.in/id/eprint/9886

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