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Conference Paper

Rajanna, K and Tanaka, S and Itoh, T and Esashi, M (2004) Reaction bonding of microstructured silicon carbide using polymer and silicon thin film. In: Proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, 5-10,2003, Lyon, France.

Journal Article

Tanaka, S and Rajanna, K and Abe, T and Esashi, M (2001) Deep reactive ion etching of silicon carbide. In: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 19 (6). 2173 -2176.

This list was generated on Thu Jan 23 23:20:06 2020 IST.