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Conference Paper

Sharma, Sudhir Kumar and Jithin, MA and Sumesh, MA and Mohan, S (2009) Design Fabrication and Calibration of Three Target Magnetron Co-sputtering System for Shape memory Alloy Thin Films. In: Proc. of Third National Conference on MEMS, Smart Structures and Materials (ISSS-2009) at CGCRI, 151-154, Kolkata.