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Bhat, KN and Gupta, Das A and Rao, PRS and Gupta, Das N and Bhattacharya, E and Sivakumar, K and Kumar, Vinoth V and Anitha, Helen L and Joseph, JD and Madhavi, SP and Natarajan, K (2007) Wafer bonding - A powerful tool for MEMS. In: Indian Journal of Pure and Applied Physics, 45 (4). pp. 311-316.