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Barve, Shruti and Deo, Mukul and Kar, Rajib and Sreenivasan, Nimisha and Kishore, Ramaswamy and Biswas, Arup and Bhanage, Bhalchandra and Rao, Mohan and Gantayet, Lalit Mohan and Patil, Dinkar (2011) Microwave ECR Plasma Assisted MOCVD of Y(2)O(3) Thin Films Using Y(tod)(3) Precursor and Their Characterization. In: Plasma Processes and Polymers, 8 (8). pp. 740-749.