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Number of items: 9.

Conference Paper

Chakraborty, Arpan and Mane, Anil U and Shivashankar, SA and Venkataraman, V (2003) Effect of Post-Metallization Hydrogen Annealing on C-V Characteristic of Zirconia Grown Using Atomic Layer Deposition. In: Novel Materials and Processes for Advanced CMOS. Symposium, 2-4 Dec. 2002, Boston, MA, USA, pp. 143-7.

Journal Article

Dagur, Pritesh and Mane, Anil U and Shivashankar, SA (2005) Thin films of $VO_2$ on glass by atomic layer deposition: microstructure and electrical properties. In: Journal of Crystal Growth, 275 (1-2). e1223-e1228.

Mane, Anil U and Shivashankar, SA (2004) Atomic layer chemical vapour deposition of copper. In: Materials Science in Semiconductor Processing, 7 (4-6). pp. 343-347.

Mane, Anil U and Shivashankar, SA (2003) MOCVD of cobalt oxide thin films: dependence of growth, microstructure, and optical properties on the source of oxidation. In: Journal of Crystal Growth, 254 (3-4). pp. 368-377.

Paranjape, Mandar A and Mane, Anil U and Raychaudhuri, AK and Shalinib, K and Shivashankar, SA and Chakravarty, BR (2002) Metal-organic chemical vapour deposition of thin films of cobalt on different substrates: study of microstructure. In: Thin Solid Films, 413 (1-2). pp. 8-15.

Mane, Anil U and Shalini, K and Wohlfart, A and Devi, A and Shivashankar, SA (2002) Strongly oriented thin films of $Co_3O_4$ deposited on single-crystal MgO(1 0 0) by low-pressure, low-temperature MOCVD. In: Journal of Crystal Growth, 240 (1-2). pp. 157-163.

Chakraborty, Arpan and Mane, Anil U and Shivashankar, SA and Venkataraman, V (2002) Effect of Post-Metallization Hydrogen Annealing on C-V Characteristic of Zirconia Grown Using Atomic Layer Deposition. In: MRS Proceedings, 745 (N5.2). .

Shalini, K and Mane, Anil U and Shivashankar, SA and Rajeswari, M and Choopun, S (2001) Epitaxial growth of Co3O4 films by low temperature, low pressure chemical vapour deposition. In: Journal of Crystal Growth, 231 (1-2). pp. 242-247.

Shalini, K and Mane, Anil U and Lakshmi, R and Shivashankar, SA and Rajeswari, M and Choopun, S (2000) Epitaxial Growth of Co3O4 Films by Low Temperature, Low Pressure Chemical Vapor Deposition. In: MRS Proceedings, 619 . p. 129.

This list was generated on Tue Oct 15 02:37:01 2019 IST.